As an important fulcrum of balancing economic growth and ecological environment protection, the efficiency of green technology innovation has become an important factor affecting the high-quality development of China"s economy. Based on the super efficiency EBM model and the provincial cross-sectional data in 2019, this paper calculates the green technology innovation efficiency of 30 provinces and cities in mainland China, explores the collaborative green technology innovation mechanism of government, industry, universities and the public based on the Quadruple helix model, and selects five antecedents: government support, environmental regulation, industrial structure optimization, university technology transfer and public participation, Using the qualitative comparative analysis method of fuzzy set, this paper explores the path of multi-agent collaborative linkage to produce regional high green technology innovation efficiency. It is found that: the explanation of green technology innovation efficiency by single condition is not strong, but compared with other conditions, government support and public participation play an important role in promoting the efficiency of regional green technology innovation; There are three key paths to improve the efficiency of regional green technology innovation, including government property science coordination, industry promotion with the help of the government and public participation under the government led logic; The two paths leading to the efficiency of non high green technology innovation are characterized by weak government support and lack of public participation.