| In－Situ Epitaxial Growth of Bi－Sr－Ca－Cu－O Superconducting Thin Films on Si（100） by rf Of－Axis Magnetron Sputering |
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| 引用本文： | 钱文生,刘融,魏同立.In－Situ Epitaxial Growth of Bi－Sr－Ca－Cu－O Superconducting Thin Films on Si（100） by rf Of－Axis Magnetron Sputering[J].东南大学学报,1996(2). |
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| 作者姓名： | 钱文生 刘融 魏同立 |
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| 作者单位： | Microelectronics Center，Southeast University，Nanjing，210096 |
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| 摘 要： | Ｉｎ－ＳｉｔｕＥｐｉｔａｘｉａｌＧｒｏｗｔｈｏｆＢｉ－Ｓｒ－Ｃａ－Ｃｕ－ＯＳｕｐｅｒｃｏｎｄｕｃｔｉｎｇＴｈｉｎＦｉｌｍｓｏｎＳｉ（１００）ｂｙｒｆＯｆ－ＡｘｉｓＭａｇｎｅｔｒｏｎＳｐｕｔｅｒｉｎｇＱｉａｎＷｅｎｓｈｅｎｇ（钱文生）ＬｉｕＲｏｎｇ（刘...
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In Situ Epitaxial Growth of Bi Sr Ca Cu O Superconducting Thin Films on Si(100) by rf Off Axis Magnetron Sputtering |
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| Qian Wenshen,Liu Rong,Wei Tongli.In Situ Epitaxial Growth of Bi Sr Ca Cu O Superconducting Thin Films on Si(100) by rf Off Axis Magnetron Sputtering[J].Journal of Southeast University(English Edition),1996(2). |
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| Authors: | Qian Wenshen Liu Rong Wei Tongli |
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| Abstract: | Bi Sr Ca Cu O superconducting thin films have been epitaxially prepared on Si(100) substrate with YSZ buffer layers by off axis rf magnetron sputtering. Structural analyses using X ray diffraction, scanning electron microscopy and atom force microscopy revealed that the qualities of these films and the formation of the superconducting phase in the films were sensitively dependent on the deposition conditions, especially the substrate temperatures. With the deposition parameters well controlled, epitaxial superconducting thin films with pure Bi 2Sr 2Ca 1Cu 2O x phase have been prepared. The zero resistance temperature was 82 K for 300 nm thick films. |
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| Keywords: | sputtering BSCCO Si |
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