Relationship between power density distribution and homogenization of diamond film in the multifilament CVD system |
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| Authors: | Ju Jianhua Mo Yaowu Huang Xiaoqin Xia Yiben |
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| Institution: | School of Material Science and Engineering |
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| Abstract: | Periodical macro stripes have been found on diamond film prepared on a Si substrate by the multifilament chemical vapor deposition (CVD) method when the filament substrate distance is less than 2 mm. The properties of the stripe on the film were characterized qualitatively by a scanning electron microscope (SEM) and Raman scattering spectrometer. The measurement results show that this stripe corresponds to the different kinds of the microstructure and thickness of the film. Through calculation of the thermal radiation energy density distribution on the surface of substrate, this phenomenon can be explained successfully. |
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| Keywords: | diamond film power density distribution |
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