| 晶圆多丝切割加工工艺参数的BP建模 |
| |
| 引用本文： | 程志华,裴仁清.晶圆多丝切割加工工艺参数的BP建模[J].常熟理工学院学报,2008,22(4):93-96. |
| |
| 作者姓名： | 程志华 裴仁清 |
| |
| 作者单位： | 上海大学机电工程与自动化学院,上海,200072 |
| |
| 摘 要： | 基于现有多丝切割的理论难以解决实际加工中的工艺问题，引入了BP神经网络对切割加工工艺进行建模，经学习与训练，实例模型误差较小。
|
| 关 键 词： | 晶圆 多丝切割 工艺 神经网络 建模 |
| 文章编号： | 1008-2794(2008)04-0093-04 |
| 修稿时间： | 2008年2月21日 |
Modeling Production of Wafer in Multi-wire Sawing |
| |
| CHENG Zhi-Hua,PEI Ren-Qing.Modeling Production of Wafer in Multi-wire Sawing[J].Journal of Changshu Institute of Technology,2008,22(4):93-96. |
| |
| Authors: | CHENG Zhi-Hua PEI Ren-Qing |
| |
| Institution: | CHENG Zhi-Hua, PEI Ren-Qing (School of Mechatronics and Automation, Shanghai University, Shanghai 200072, China) |
| |
| Abstract: | Considering the fact that the existing theory of multi-wire sawing is immature to direct the production of wafer,in this paper,a new method that employ the artificial neural network in the processing modeling is suggested.Some samples are used to train the model.The result approves that the method can effectively solve the modeling problem. |
| |
| Keywords: | multi-wire sawing technique artificial neural networks modeling |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
