| 大面积微波CVD反应腔中电磁场分布的研究 |
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| 引用本文： | 王仁海,邹卫东.大面积微波CVD反应腔中电磁场分布的研究[J].黄冈师范学院学报,2002,22(6):23-25,78. |
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| 作者姓名： | 王仁海 邹卫东 |
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| 作者单位： | 咸宁学院,物理系,湖北,咸宁,437005 |
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| 摘 要： | 根据大面积微波CVD反应腔的简单模型，采用FIT算法计算了腔内的电磁场，并用计算机模拟了反应腔中电磁场的分布，寻找影响腔内电磁场分布的参数，试图为大面积金刚石膜微波反应腔的设计提供一定的依据。
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| 关 键 词： | 电磁场 等离子体 微波CVD反应腔 微波化学气相沉淀 金钢石薄膜 |
| 文章编号： | 1003-8078(2002)06-0023-03 |
Study on the distribution of electromagnetic field in large microwave-CVD reactor |
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| WANG Ren hai ,ZOU Wei dong.Study on the distribution of electromagnetic field in large microwave-CVD reactor[J].Journal of Huanggang Normal University,2002,22(6):23-25,78. |
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| Authors: | WANG Ren hai ZOU Wei dong |
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| Institution: | WANG Ren hai 1,ZOU Wei dong 2 |
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| Abstract: | Based on a simple microwave CVD reactor model, the electromagnetic field in the reactor is calculated by employing the Finite Integration Theory (FIT), and the distribution of the electromagnetic field is simulated by computer programs in this paper. The parameters which affect the distribution of the electromagnetic field is also discussed so that it can serve the design of the large microwave CVD reactor |
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| Keywords: | electromagnetic field plasma microwave CVD reactor |
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