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构建真空镀膜实验三维仿真系统
引用本文:杨亮,刘钟馨,林仕伟,曹阳.构建真空镀膜实验三维仿真系统[J].实验技术与管理,2012,29(2):71-75.
作者姓名:杨亮  刘钟馨  林仕伟  曹阳
作者单位:海南优势资源化工材料应用技术教育部重点实验室,海南海口 570228;硅锆钛资源综合开发与利用海南省重点实验室,海南海口 570228;海南大学材料与化工学院,海南海口 570228
基金项目:海南省教育厅高等学校科学研究项目,海南大学教务处科研资助项目
摘    要:利用Visual Basic 2010结合OpenGL API,在Windows 7操作系统平台下制作了真空镀膜实验仿真系统。三维虚拟设备模型由3D MAX软件制作,三维模型交互操作通过OpenGL API实现。该软件还可以模拟真空仪器所处的各种运行状态并对操作错误步骤进行处理。构造了薄膜生长的蒙特卡罗理论模型,并利用该模型研究薄膜生长的形貌,对于决定薄膜形貌诸多影响因素也可进行讨论;利用高性能图形处理软件(OpenGL API)成功展示了薄膜成长的分形特征及表面粗糙度表征。该软件有效地实现了镀膜过程及薄膜生长过程,增强了学生对薄膜生长机理的理解,提高了教学质量,培养了学生学习兴趣和增强了学生的实验操作能力。

关 键 词:真空镀膜机  仿真系统  VB2010  OpenGL

Constructing three-dimensional simulation system of vacuum film experiment
Yang Liang , Liu Zhongxin , Lin Shiwei , Cao Yang.Constructing three-dimensional simulation system of vacuum film experiment[J].Experimental Technology and Management,2012,29(2):71-75.
Authors:Yang Liang  Liu Zhongxin  Lin Shiwei  Cao Yang
Institution:1,2,3(1.Hainan Provincial Key Laboratory of Research on Utilization of Si-Zr-Ti Resources,Haikou 570228,China; 2.Key Laboratory of Application Technology of Hainan Superior Resources Chemical Materials,Ministry of Education,Haikou 570228,China;3.Material and Chemical College,Hainan University,Haikou 570228,China)
Abstract:Based on the research on the characteristics of the vacuum film experiment,this article introduces a design method of simulated experiment system which is based on OpenGL API and developed with Visual Basic 2010 under Windows7 platform.Three-dimensional virtual equipment via 3D MAX is built and 3D interaction is realized by OpenGL API.Furthermore,the vacuum film experiment simulation software is connected so as to simulate various running states of substation by handlers and to treat operation fault.A Monte Carlo model to simulate thin film growth is constructed and the morphology of thin film growth is investigated by using this model.How many factors affect the morphology of vapor coating film is shown by simulated experimental methods.The function of 3D display of film surface is realized by a high-performance graphic processing system(OpenGL API).The software successfully shows the fractal geometric characters and the surface roughness.The simulation experiments integrate theory and practice effectively,and strengthen students’ understanding of thin film growth mechanism.In the application of experiment and teaching,this system increases teacher’s attraction,improves teaching quality,arouses student’s interest of study and enhances the student’s ability of operation.
Keywords:vacuum coating machine  simulation system  VB2010  OpenGL
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