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Er掺杂ZnO薄膜光学特性的研究
引用本文:徐井华,崔舒,刘成有.Er掺杂ZnO薄膜光学特性的研究[J].通化师范学院学报,2011,32(6):32-33.
作者姓名:徐井华  崔舒  刘成有
作者单位:通化师范学院物理系,吉林通化,134002
基金项目:通化师范学院自然科学科研项目(NO.201051)
摘    要:采用溶胶凝胶工艺,分别在普通载玻片和Si片上生长了不同浓度的Er掺杂ZnO薄膜,稀土Er3+与Zn2+的摩尔比分别为1%、2%、3%,所得薄膜采用X射线衍射仪(XRD)、原子力显微镜(AFM)、紫外可见分光光度计(UVS)、光致荧光光谱(PL)对样品的结构、形貌和发光进行表征.结果表明掺杂后的样品仍为六角纤锌矿结构,随着掺杂浓度提高,掺杂样品的XRD衍射峰向大角方向微移,透射边向短波方向微移,紫外发光峰的强度逐渐增强,表面均呈颗粒状且尺寸逐渐减小.

关 键 词:Er掺杂  ZnO薄膜  发光特性  表面形貌

Optical Property of Er-doped ZnO Thin Films
XU Jing-hua,CUI Shu,LIU Cheng-you.Optical Property of Er-doped ZnO Thin Films[J].Journal of Tonghua Teachers College,2011,32(6):32-33.
Authors:XU Jing-hua  CUI Shu  LIU Cheng-you
Institution:XU Jing-hua,CUI Shu,LIU Cheng-you(Department of Physics,Tonghua Normal University,Tonghua,Jilin 134002,China)
Abstract:In this paper,Er-doped ZnO thin films were deposited on the substrates of slide and Si by sol-gel method.The Er3+/Zn2+ ratio were 1%,2%,3%,All the samples were characterized by X-ray diffraction(XRD),atomic force microscope(AFM),ultra-violet spectrometer(UVS) and photoluminescence(PL).Er-doped ZnO films were found that doped samples were still hexagonal wurtzite structure.As the doping concentration increased,XRD diffraction peaks shifted significantly to large angle,the transmission side had blue shift and...
Keywords:Er-doped  ZnO thin film  luminescence property  surface morphology  
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