| 电场方向对铝诱导非晶硅薄膜固相晶化影响浅析 |
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| 引用本文： | 陈一匡.电场方向对铝诱导非晶硅薄膜固相晶化影响浅析[J].韩山师范学院学报,2007,28(3):50-54. |
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| 作者姓名： | 陈一匡 |
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| 作者单位： | 韩山师范学院,物理与电子工程系,广东,潮州,521041 |
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| 基金项目： | 韩山师范学院青年科学基金的课题 |
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| 摘 要： | 通过扫描电子显微镜、X射线衍射仪和喇曼谱仪检测铝诱导非晶硅薄膜的场致固相晶化的情况,分析了电场方向对铝诱导非晶硅薄膜固相晶化的影响.
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| 关 键 词： | 铝诱导 非晶硅薄膜 电场 固相晶化 电场 方向 非晶硅薄膜 固相晶化 影响 Different Electric Fields Films Crystallization Effects 分析 情况 场致 检测 谱仪 喇曼 衍射仪 射线 电子显微镜 扫描 |
| 文章编号： | 1007-6883（2007）03-0050-05 |
| 修稿时间： | 2006-09-04 |
An Analysis of Effects on Aluminum-induced Crystallization of A-si Films in Electric Fields with Different Directions |
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| CHEN Yi-kuang.An Analysis of Effects on Aluminum-induced Crystallization of A-si Films in Electric Fields with Different Directions[J].Journal of Hanshan Teachers College,2007,28(3):50-54. |
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| Authors: | CHEN Yi-kuang |
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| Institution: | Department of Physics and Electronic Engineering, Hanshan Normal University, Chaozhou 521041. China |
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| Abstract: | Test crystallization of amorphous silicon(a-Si)films in electric fields by scanning electron microscopy(SEM),x-ray diffraction(XRD)and Raman spectroscopy.An analysis of effects on aluminum-induced crystallization of a-Si films in electric fields with different directions is elucidated in this article. |
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| Keywords: | aluminum-induced amorphous silicon film electric field crystallization |
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