| 锂铁氧体表面沉积Cu-Ti复合金属波导膜系的工艺分析研究 |
| |
| 引用本文： | 戴国钧.锂铁氧体表面沉积Cu-Ti复合金属波导膜系的工艺分析研究[J].实验室研究与探索,2004,23(4):19-20,30. |
| |
| 作者姓名： | 戴国钧 |
| |
| 作者单位： | 扬州大学,江苏,扬州,225009 |
| |
| 摘 要： | 采用磁控溅射镀膜方法,在锂铁氧体材料表面,制备了Cu-Ti复合金属波导膜系。本文简单介绍了设备的改造特点,对整个工艺过程进行了分析研究,对制备的Cu-Ti复合金属波导膜系进行了性能测试,结果表明,用该工艺所制备的波导膜系性能指标达到微波器件的要求。
|
| 关 键 词： | 锂铁氧体 Cu-Ti复合金属波导膜系 工艺 |
| 文章编号： | 1006-7167(2004)04-0019-03 |
Analysis of the Process for Plating Cu-Ti Co-metal Wave-Guide Films on Li-Ferrite Surface |
| |
| DAI,Guo-jun.Analysis of the Process for Plating Cu-Ti Co-metal Wave-Guide Films on Li-Ferrite Surface[J].Laboratory Research and Exploration,2004,23(4):19-20,30. |
| |
| Authors: | DAI Guo-jun |
| |
| Abstract: | The Cu-Ti co-metal wave-guide films on Li-ferrite material surface were made by a magnetron sputtering deposition. The characteristics of the machine were simply introduced.The process technology was analyzed. The measurements results show that the properties of Cu-Ti Co-metal wave-guide films are suitable for the microwave elements. |
| |
| Keywords: | Li-ferrite Cu-Ti Co-metal wave-guide films process |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
