| Experimental Study on External Low Frequency Vibration Influence on SPM |
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| 作者姓名： | 陈津平 郭彤 胡晓东 胡小唐 |
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| 作者单位： | State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，Tianjin 300072 China，Tianjin 300072 China，Tianjin 300072 China，Tianjin 300072 China |
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| 摘 要： | The influence of external low frequency (0-100 Hz) vibration on the tip-sample interaction in SPM is the main concern of this paper. A concept, vibration rejection ratio (VRR) proposed by Thompson et al, was investigated theoretically and experimentally. A concise theoretical background was introduced, a vibration stimulating and measuring system for SPM was built up, and an experimental research of the influence on SPM VRR was carried out with different SPM probes, samples, tip pre-loads and open/close loops of tip-sample interaction. It was proved both in theory and experiment that SPM VRR had correlations with the spring constant, the air damping constant, the effective mass of the cantilever, the contact spring constant and the contact damping constant between tip and sample. SPM's vibration rejecting ability can be improved by longer cantilever probe, softer sample surface, greater tip pre-load, and close-loop control for tip-sample interaction. More attention should be paid to a proper combination of the above parameters.
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| 关 键 词： | 外加低频振动 SPM 扫描探针显微镜 探头-样品相互作用 实验研究 |
| 收稿时间： | 2007-01-30 |
Experimental Study on External Low Frequency Vibration Influence on SPM |
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| CHEN Jinping,GUO Tong,HU Xiaodong,HU Xiaotang.Experimental Study on External Low Frequency Vibration Influence on SPM[J].Transactions of Tianjin University,2007,13(2):98-102. |
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| Authors: | CHEN Jinping GUO Tong HU Xiaodong HU Xiaotang |
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| Abstract: | The influence of external Iow frequency (0-100 Hz) vibration on the tip-sample interaction in SPM is the main concern of this paper. A concept, vibration rejection ratio (VRR) proposed by Thompson et al, was investigated theoretically and experimentally. A concise theoretical background was introduced, a vibration stimulating and measuring system for SPM was built up, and an experimental research of the influence on SPM VRR was carried out with different SPM probes, samples, tip pre-loads and open/close loops of tip-sample interaction. It was proved both in theory and experiment that SPM VRR had correlations with the spring constant, the air damping constant, the effective mass of the cantilever, the contact spring constant and the contact damping constant between tip and sample. SPM's vibration rejecting ability can be improved by longer cantilever probe, softer sample surface, greater tip pre-load, and close-loop control for tip-sample interaction. More attention should be paid to a proper combination of the above parameters. |
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| Keywords: | vibration tip-sample interaction SPM vibration rejection ratio cantilever |
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