| 酸增殖剂的合成及其应用原理 |
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| 引用本文： | 陈娟,张颂培,祝钧,李森兰.酸增殖剂的合成及其应用原理[J].洛阳师范学院学报,2004,23(2):47-51. |
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| 作者姓名： | 陈娟 张颂培 祝钧 李森兰 |
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| 作者单位： | 1. 北京工商大学化学与环境工程学院,北京,100037
2. 洛阳师范学院化学系,河南洛阳,471022 |
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| 摘 要： | 综述了酸增殖剂研究新进展 ,重点介绍了几种有应用前景的酸增殖剂及其反应机理 .讨论了酸增殖剂在化学增幅型抗蚀剂体系、UV紫外光固化材料、CTP制版中的应用 .
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| 关 键 词： | 酸增殖剂 化学增幅型抗蚀剂 磺酸酯 |
| 文章编号： | 1009-4970(2004)02-0047-05 |
| 修稿时间： | 2004年1月8日 |
Research Development of Acid Proliferation Generator and Their Application |
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| CHEN Juan ,ZHANG Song-pei ,ZHU Jun ,LI Sen-lan.Research Development of Acid Proliferation Generator and Their Application[J].Journal of Luoyang Teachers College,2004,23(2):47-51. |
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| Authors: | CHEN Juan ZHANG Song-pei ZHU Jun LI Sen-lan |
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| Institution: | CHEN Juan 1,ZHANG Song-pei 1,ZHU Jun 1,LI Sen-lan 2 |
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| Abstract: | The development of research for acid proliferation generator (APG) was reviewed and some kinds of APG having application prospect and their reaction mechanism were introduced in detail;the usage of APG in chemically amplified photoresist and UV solidification materials,and CTP were also discussed in this review. |
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| Keywords: | acid proliferation generator chemically amplified photoresist sulfonic acid ester |
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