| 一种新型的闭环真空硅微陀螺仪(英文) |
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| 引用本文： | 夏敦柱,王寿荣,周百令.一种新型的闭环真空硅微陀螺仪(英文)[J].东南大学学报,2009,25(1). |
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| 作者姓名： | 夏敦柱 王寿荣 周百令 |
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| 作者单位： | 东南大学仪器科学与工程学院,南京,210096
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| 基金项目： | 国家高技术研究发展计划(863计划)，National Delense Pre-Research Support Program |
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| 摘 要： | 提出了一种新型的硅微陀螺仪闭环控制策略.所设计的硅微陀螺仪工作在10 Pa,采用金属壳CAN封装形式,驱动和检测两模态品质因素高达10000以上,且都采用了基于静电力反馈方法实现闭环.驱动模态采用单边驱动单边检测,尽量使线路简化;检测模态采用双重分解和重构闭环回路.测试结果表明:有用信号和正交信号实现很好的相位解耦,互不影响;在满量程4-300(°)/s、标度因素9.6 mV/((°)·S)的情况下,零偏稳定性已达到28(°)/h;非线性度达到400×10-6;仿真带宽大于100 Hz.这较以前设计的仅在空气下工作的硅微陀螺性能提高了近2个数量级.
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| 关 键 词： | 硅微陀螺仪 自激振荡 双闭环检测 标度因素 零偏稳定性 |
A novel closed-loop vacuum silicon microgyroscope |
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| Xia Dunzhu Wang Shourong Zhou Bailing.A novel closed-loop vacuum silicon microgyroscope[J].Journal of Southeast University(English Edition),2009,25(1). |
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| Authors: | Xia Dunzhu Wang Shourong Zhou Bailing |
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| Institution: | School of Instrument Science and Engineering;Southeast University;Nanjing 210096;China |
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| Abstract: | A novel closed-loop control strategy of a silicon micro-gyroscope(SMG) is proposed.The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa.Its quality factor reaches greater than 10 000.Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits.Both single side driving and sensing methods are used to simplify the drive circuit.These dual channel decomposition and reconstruction closed loops... |
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| Keywords: | silicon micro-gyroscope(SMG) self oscillating dual-charmel closed-loop detection scale factor zero bias stability |
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