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透射电子显微镜中物镜光阑的作用与影响
引用本文:杨彦杰,董全林,袁水平,于成交,张春熹,许春兰.透射电子显微镜中物镜光阑的作用与影响[J].雁北师范学院学报,2011,27(5).
作者姓名:杨彦杰  董全林  袁水平  于成交  张春熹  许春兰
作者单位:1. 北京航空航天大学微纳测控与低维物理教育部重点实验室,北京,100191
2. 北京电子科技职业学院,北京,100036
摘    要:从几何电子光学理论出发,阐述了物镜光阑对影响透射电镜极限分辨率的主要因素(球差、色差和衍射)和场深、焦深的影响,并根据傅里叶电子光学理论,研究并计算了物镜光阑对透射电镜电子频谱的影响。

关 键 词:透射电子显微镜  物镜光阑  电子光学

The Role and Influence of Aperture of the Objective Lens in the TEM
YANG Yan-jie,DONG Quan-lin,YUAN Shui-ping,YU Cheng-jiao,ZHANG Chun-xi,XU Chun-lan ,School of Instrumentation Science , Opto-electronics Engineering,Beihang University,Beijing.The Role and Influence of Aperture of the Objective Lens in the TEM[J].Journal of Yanbei Teachers College,2011,27(5).
Authors:YANG Yan-jie  DONG Quan-lin  YUAN Shui-ping  YU Cheng-jiao  ZHANG Chun-xi  XU Chun-lan  School of Instrumentation Science  Opto-electronics Engineering  Beihang University  Beijing
Institution:YANG Yan-jie1,DONG Quan-lin1,YUAN Shui-ping1,YU Cheng-jiao1,ZHANG Chun-xi1,XU Chun-lan2 (1.Key Laboratory of Micro-nano Measurement-Manipulation and Physics(Ministry of Education),School of Instrumentation Science and Opto-electronics Engineering,Beihang University,Beijing 100191,2.Beijing Vocational College of Electronic Science,Beijing,100036)
Abstract:In this paper,the influence to the main factors influencing the limiting resolution(including spherical aberration,chromatic aberration and diffraction),field depth and depth of focus by the aperture of objective lens is summarized.According to Fourier electron optical theory,we study and calculate the influence of aperture on the spectrum of electron beam.
Keywords:transmission electron microscopy  aperture of objective lens  electron optics
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