| 光刻胶采购量精准预测模型的研究 |
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| 引用本文： | 邓群.光刻胶采购量精准预测模型的研究[J].北京工业职业技术学院学报,2013,12(4):119-122. |
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| 作者姓名： | 邓群 |
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| 作者单位： | 上海交通大学机械与动力工程学院,上海,200030 |
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| 摘 要： | 针对半导体制造行业中,光刻制造工艺所用到的各种光刻胶使用量不易准确预测的现状,提出一种准确预测需求的模型.通过对不同光刻工艺中光刻胶使用量的解析并结合主生产计划,预测出符合企业需求的不同光刻胶的需求量,精准用于采购.经过采用模型生成的数据进行检验,验证了模型的可行性和有效性.
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| 关 键 词： | 半导体制造 光刻胶 采购量 生产计划 |
Research on Accurate Purchase Quantity Prediction Model of Photoresist in Semiconductor Wafer Fabrication |
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| Deng Qun.Research on Accurate Purchase Quantity Prediction Model of Photoresist in Semiconductor Wafer Fabrication[J].Journal of beijing vocational & technical institute of industry,2013,12(4):119-122. |
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| Authors: | Deng Qun |
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| Institution: | Deng Qun (School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200030, China) |
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| Abstract: | It is difficult to predict the accurate amount of various photoresists used in semiconductor wafer fabrica- tion. In this paper, based on the analysis of photoresist used in different photolithography process, combined with production plan, the demand of business for photoresist is predicted for accurate purchase. After tests with model - generated data, feasibility and effectiveness of the model are verified. |
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| Keywords: | semiconductor wafer fabrication photoresist purchase production plan |
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