| Epitaxial Growth of YSZ as Bufer Layers for High Tc Superconducting Filmson Si Substrates |
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| 作者姓名： | Qian Wensheng Liu Rong Wei Tongli |
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| 作者单位： | Milroelectronics Center，Southeast University，Nanjing 210018 |
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| 摘 要： | ＥｐｉｔａｘｉａｌＧｒｏｗｔｈｏｆＹＳＺａｓＢｕｆｅｒＬａｙｅｒｓｆｏｒＨｉｇｈＴｃＳｕｐｅｒｃｏｎｄｕｃｔｉｎｇＦｉｌｍｓｏｎＳｉＳｕｂｓｔｒａｔｅｓＱｉａｎＷｅｎｓｈｅｎｇ（钱文生）ＬｉｕＲｏｎｇ（刘融）ＷｅｉＴｏｎｇｌｉ（魏同立）（Ｍｉｌｒｏｅ...
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Epitaxial Growth of YSZ as Buffer Layers for High T c Superconducting Films on Si Substrates |
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| Qian Wensheng,Liu Rong Wei Tongli.Epitaxial Growth of YSZ as Buffer Layers for High T c Superconducting Films on Si Substrates[J].Journal of Southeast University(English Edition),1996(1). |
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| Authors: | Qian Wensheng Liu Rong Wei Tongli |
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| Abstract: | Epitaxial films of Yttria Stabilized Zirconia(YSZ) were successfully grown on Si substrates by RF magnetron sputter, the atomic structure and the lattice mismatch of YSZ/Si were presented. Auger electron spectroscopy, X ray diffraction and scanning electron micrographs were used for revealing the qualities of YSZ films. High quality Bi Sr Ca Cu O superconducting film whose T c was above 80K was successfully deposited on YSZ/Si. |
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| Keywords: | epitaxial growth Yttria Stabilized Zirconia silicon |
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