| 双层透明薄膜制备及氧含量对折射率影响研究 |
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| 引用本文： | 朱亚彬,寇克瑜,何帆.双层透明薄膜制备及氧含量对折射率影响研究[J].实验技术与管理,2012,29(7):36-38. |
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| 作者姓名： | 朱亚彬 寇克瑜 何帆 |
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| 作者单位： | 北京交通大学理学院物理实验中心,北京,100044 |
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| 基金项目： | 中央高校基本科研业务费专项基金(2009JBM098);北京市自然科学基金(2113050) |
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| 摘 要： | 利用磁控溅射技术在玻璃基片上分别沉积ZnOx薄膜、TiO2-y薄膜和TiO2-y/ZnOx双层透明薄膜,改变薄膜沉积过程中的氩气(Ar)和氧气((O2)的比例,获得具有不同氧含量的ZnOx薄膜和TiO2-y薄膜.采用椭偏仪测定所有样品的折射率,仔细研究薄膜中氧含量对折射率的影响.分别选择具有较大的折射率TiO2-y薄膜和具有较小的折射率ZnOx薄膜的生长条件,制备TiO2-y/ZnOx双层薄膜,获得光密媒质/光疏媒质双层结构,并观察到He-Ne激光从ZnOx薄膜入射到TiO2-y/ZnOx界面上发生的全反射现象.研究成果适用于大学生物理实验中的研究型实验或大学创新实验.
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| 关 键 词： | 透明薄膜 磁控溅射技术 全反射 |
Fabrication of transparent TiO2-y/ZnOx bilayer and influence of oxygen composition on refractivity |
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| Zhu Yabin
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Kou Keyu
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He Fan.Fabrication of transparent TiO2-y/ZnOx bilayer and influence of oxygen composition on refractivity[J].Experimental Technology and Management,2012,29(7):36-38. |
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| Authors: | Zhu Yabin Kou Keyu He Fan |
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| Institution: | (Center of Physics Experiment,School of Science,Beijing Jiaotong University,Beijing 100044,China) |
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| Abstract: | Transparent ZnO1-x,TiO2-y thin films and ZnO1-x /TiO2-y bilayer were deposited on normal glass substrates by magnetron sputtering.Controlling the ratio of argon(Ar) to oxygen(O2),ZnO1-x,TiO2-y thin films with different oxygen composition were obtained.The refractivity of all ZnO1-x,TiO2-y thin films were measured by ellipsometry and the influence of oxygen composition on refractivity was studied in detail.ZnO1-x/TiO2-y bilayer was prepared under the growth conditions to obtain lower refractivity of ZnO1-x and higher refractivity of TiO2-y.The thinner medium/ denser medium structure was grown.The total reflection phenomena were observed when He-Ne red laser struck the interface of ZnO1-x/TiO2-y from ZnO1-x thin film.The results are suitable for research and innovation-led experiment for undergraduate students in general physics experiments. |
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| Keywords: | transparent thin film magnetron sputtering total reflection |
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