| 陶瓷靶材的制备及性能表征 |
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| 引用本文： | 倪佳苗,程娟.陶瓷靶材的制备及性能表征[J].湖北第二师范学院学报,2012(2):71-73. |
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| 作者姓名： | 倪佳苗 程娟 |
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| 作者单位： | 湖北第二师范学院建筑与材料工程系 |
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| 摘 要： | 以ZnO、Al2O3粉体为原料,采用常压烧结方法制备高导电性Al:ZnO(AZO)陶瓷靶材,并系统研究了不同的成型压力、烧结工艺及其烧结温度对靶材电学特性和密度的影响。结果表明:成型压力的大小对于ZAO靶材本身的密度、成品率及最后烧结的性能都有很大的影响。成型压力为14Mpa时,靶材的电阻率最小,为0.35Ωcm。烧结温度的选择也是制备靶材的关键,为了避免靶材出现断层、上表面壳曲、微裂纹甚至开裂现象,要采用缓慢升温,长时间保温与缓慢降温的方法。实验表明,在1250℃时,AZO靶材表面平整致密,基本上达到了陶瓷靶材的烧结终点。
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| 关 键 词： | ZnO 陶瓷靶材 成型压力 烧结温度 |
Study on Preparation and Performance of ZnO Ceramic Target |
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| NI Jia-miao,CHENG Juan.Study on Preparation and Performance of ZnO Ceramic Target[J].Journal of Hubei University of Education,2012(2):71-73. |
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| Authors: | NI Jia-miao CHENG Juan |
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| Institution: | (Department of Architecture and Material Engineering,Hubei University of Education,Wuhan 430205,China) |
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| Abstract: | High-conductivity A1∶ZnO ceramic targets were fabricated by normal pressure sintering method using ZnO,Al2O3 powder as raw material.The effect of different forming pressure,sintering process on the morphology and electrical properties of the target were studied in our paper.The results showed that the molding pressure had a significant impact on AZO target density and performance of the final sintering.When molding pressure is 14Mpa,the target has the minimum resistivity for 0.35 Ωcm.What’s more,sintering temperature is the key of the preparation.In order to avoid the phenomenon of micro-cracking or crack turtle,we need the method of slow heating,long heat preservation and a long slow cooling.Experiments were showed that the temperature of 1250℃ was sintered temperature due to the target had high dense and integrity. |
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| Keywords: | ZnO ceramic targets molding pressure sintering temperature |
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