| 金刚石薄膜的制备和结构分析 |
| |
| 引用本文： | 郭扬铭,陈树光,张凯明.金刚石薄膜的制备和结构分析[J].中山大学学报论丛,1992(2). |
| |
| 作者姓名： | 郭扬铭 陈树光 张凯明 |
| |
| 作者单位： | 中山大学物理学系，中山大学物理学系，广东工学院化工系 1988级研究生 广东省国家安全厅 |
| |
| 摘 要： | 金刚石薄膜的制备与热丝温度、衬底温度、工作室压强及反应气体浓度有关,氢原子具有抑制石墨生长的作用,衬底的表面处理对金刚石薄膜的生长有很大影响。本文还试图用晶体生长和相变理论解释金刚石薄膜的生长过程。
|
| 关 键 词： | 金刚石薄膜 X射线衍射 啦曼光谱 |
Systhesis of Diamond Films and Structure Analysis |
| |
| Guo Yangming,Chen Shuguang,Zhang Kaiming.Systhesis of Diamond Films and Structure Analysis[J].Supplement to the Journal of Sun Yatsen University,1992(2). |
| |
| Authors: | Guo Yangming Chen Shuguang Zhang Kaiming |
| |
| Institution: | Guo Yangming;Chen Shuguang;Zhang Kaiming Department of Physics |
| |
| Abstract: | The diamond films are prepared by hot-filament CVD. The feedstock is gaseous butane(C_4H_(10)) and the characteristics of the diamond film are analyzed by its Raman spectrum, scanning electron microscopy and X-ray diffraction spectroscopy. The results show that the quality of these films are related to the tempera- ture of filament and substrate, the proportion of butane to hydrogen and the reactor pressure. Nucleation is affected by the disposition of the surface on the substrate. The mechanism of the growth of the diamond film is tried to be interpreted by the crystal growth and phase transform theories. |
| |
| Keywords: | diamond film X--ray diffraction Raman spectrum |
| 本文献已被 CNKI 等数据库收录！ |
