Development of integrated precision vibration-assisted micro-engraving system |
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| Authors: | Huawei Chen Minglong Cheng Youjie Li Deyuan Zhang |
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| Institution: | 1. School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China;Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology, Japan
2. School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
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| Abstract: | A novel precision vibration-assisted micro-engraving system was developed by the integration of fast tool servo and ultrasonic elliptical vibration system, in which the flexure hinge was designed to avoid backlash and PID control algorithm was established to guarantee specific precision. Apart from experimental validation of the performance of the system, various micro-V-grooves cutting experiments on aluminum alloy, ferrous material and hard cutting material were performed, in which Kistler force sensor wa... |
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| Keywords: | micro-structure surface micro-engraving fast tool servo ultrasonic elliptical vibration precision cutting |
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