| VCA Direct-Drive High Speed and Precision XY Table |
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| 作者姓名： | 赵兴玉 冯晓梅 张大卫 |
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| 作者单位： | School of Mechanical Engineering Tianjin University，School of Mechanical Engineering，Military Traffic Institute，School of Mechanical Engineering，Tianjin University，Tianjin 300072，China，Tianjin 300161，China，Tianjin 300072，China |
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| 摘 要： | In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy.
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| 关 键 词： | 音圈致动装置 退耦装置 电装置 精密度 |
VCA Direct-Drive High Speed and Precision XY Table |
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| ZHAO Xingyu,FENG Xiaomei,ZHANG Dawei.VCA Direct-Drive High Speed and Precision XY Table[J].Transactions of Tianjin University,2007,13(6):398-404. |
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| Authors: | ZHAO Xingyu FENG Xiaomei ZHANG Dawei |
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| Institution: | 1. School of Mechanical Engineering, Tianjin University, Tianjin 300072, China
2. School of Mechanical Engineering, Military Traffic Institute, Tianjin 300161, China |
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| Abstract: | In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy. |
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| Keywords: | XY table voice coil actuator(VCA) decoupling mechanism electromechanical coupling control algorithm |
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