| 样品的倾斜度对椭偏法测量薄膜参数的影响 |
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| 引用本文： | 杨昌虎,曾晓英,廖家欣.样品的倾斜度对椭偏法测量薄膜参数的影响[J].实验室研究与探索,2007,26(7):20-22. |
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| 作者姓名： | 杨昌虎 曾晓英 廖家欣 |
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| 作者单位： | 长沙理工大学,物理与电子科学学院,湖南,长沙,410076 |
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| 摘 要： | 为了研究薄膜样品的倾斜程度对椭偏法测量薄膜参数的影响,运用椭偏法测量原理及Matlab软件,分析与计算了薄膜样品的倾斜度对测量薄膜参数的影响程度,结果表明这种影响是很小的,并通过实验验证了理论分析与实验结果是相符的。为迅速调整好椭偏仪提供了理论和实验依据。
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| 关 键 词： | 椭偏仪 薄膜 倾斜度 相对误差 |
| 文章编号： | 1006-7167（2007）07-0020-03 |
| 收稿时间： | 2006-09-01 |
| 修稿时间： | 2006-09-01 |
Influence of Sample Inclination on Measuring Film Parameter by Ellipsometry Method |
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| YANG Chang-hu,ZENG Xiao-ying,LIAO Jia-xin.Influence of Sample Inclination on Measuring Film Parameter by Ellipsometry Method[J].Laboratory Research and Exploration,2007,26(7):20-22. |
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| Authors: | YANG Chang-hu ZENG Xiao-ying LIAO Jia-xin |
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| Institution: | College of Physics and Electrical Science, Changsha University of Science and Technology, Changsha 410076, China |
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| Abstract: | In order to study the Influence of sample inclination on measuring film parameter byellipsometry method,the impact degree of sample inclination on film parameter was analysed andcalculated by utilizing principle of ellipsometric measurement and MATLAB software in this paper.It is show that this influence is negligible and experimental results agree with the theoreticalones.This can afford the theoretical and experimental proof for adjusting ellipsometer rapidly. |
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| Keywords: | ellipsometer film inclination relative error |
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