| 硬质薄膜研究综述 |
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| 引用本文： | 李根,张高会.硬质薄膜研究综述[J].宁波教育学院学报,2010,12(5):82-85. |
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| 作者姓名： | 李根 张高会 |
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| 作者单位： | 中国计量学院,浙江,杭州,310018 |
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| 摘 要： | 论述了硬质薄膜的发展历史,分析了近年来硬质薄膜的发展现状;叙述了合成硬质薄膜的几种方法,并对各种方法的优缺点进行了对比分析。指出类金刚石薄膜、纳米复合硬质薄膜等依然是今后一段时期的研究热点。
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| 关 键 词： | 硬质薄膜 CVD PVD 双辉 |
The Research Status and Prospect of Carbide Films |
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| LI Gen,ZHANG Gao-hui.The Research Status and Prospect of Carbide Films[J].Journal of Ningbo Institute of Education,2010,12(5):82-85. |
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| Authors: | LI Gen ZHANG Gao-hui |
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| Institution: | (Institute of Surface Physics,China Jiliang University,Hangzhou 310018,China) |
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| Abstract: | The latest historical development of carbide films preparation processes is briefly described in this paper;the synthesis of carbide films in several ways are described,and the advantages and disadvantages of each method are compared too.It is conspicuous that the DLC,nano-composite carbide films are still the research focus in the coming period. |
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| Keywords: | CVD PVD |
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