共查询到19条相似文献,搜索用时 218 毫秒
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1mol%TiO2—SnO2薄膜的溶胶—凝胶制备及其气敏特性 总被引:1,自引:0,他引:1
以无机盐SnCl2·2H2O为主体原料,以(C4H9O)4Ti为掺杂剂,无水乙醇为溶剂,采用溶胶-凝胶(Sol-Gel)工艺制备了TiO2掺杂的SnO2薄膜。采用差热-失重(DTA-TG)及X射线衍射(XRD)等分析手段研究了1mol%TiO2-SnO2薄膜的热分解晶化过程及物相组成。发现1mol%TiO2-SnO2薄膜在常温下对NOx气体具有较好的气敏性能,并可以在不同的工作温度下检测低浓度的NOx及H2S气体。本文还讨论了1mol%TiO2-SnO2薄膜对NOx及H2S的气敏机理。 相似文献
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为了简化制作工艺,使温度分布均匀以及降低功耗,设计了一种基于MEMS制造工艺的悬臂共面式SnO2气体传感器.使用有限元法对这种传感器及膜结构堆积于硅基底上的封闭膜式气体传感器进行了稳态热分析,结果表明悬臂共面式传感器拥有更均匀的温度分布和更低的功耗.当最高温度为383℃时功耗仅为7mW,敏感薄膜上的温差低于14℃.为解决悬臂易碎的问题,提出了一种新的制造工艺,该过程在正面刻蚀SiO2层形成悬臂结构前沉积SnO2敏感薄膜,并采用深反应离子刻蚀的方法对硅基底进行体刻以避免湿法刻蚀对传感器表面的化学污染.整个过程总共需要4块掩模板.采用旋涂法溶胶凝胶法将掺有Fe离子的SnO2薄膜沉积于基底上作为敏感元件.该器件对氢气表现出了良好的气敏性能,随着氢气浓度从50×10-6上升到2000×10-6,灵敏度逐渐提高,在2000×10-6时的灵敏度为30. 相似文献
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磁控溅射法制备氧化镓薄膜 总被引:1,自引:0,他引:1
宋歌 《宿州教育学院学报》2007,10(2):126-127
随着半导体光电技术的日益发展,宽禁带透明导电氧化物薄膜已经成为半导体材料研究的热点之一。氧化镓薄膜具有结构简单、成本低廉、响应快、便于制造的优点,而且还有很高的化学稳定性。它作为一种新型的气体传感器材料近年来日益受到重视。本文研究了通过磁控溅射法制备氧化镓薄膜时,不同的热处理温度对氧化镓薄膜结晶质量的影响。并利用X射线衍射仪,紫外可见透射光谱,对氧化镓薄膜的结构性能及表面形貌进行了测试和分析。 相似文献
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《实验室研究与探索》2017,(4):52-55
设计了基于纳米修饰石墨烯的湿敏传感器呼吸检测装置,并对其电容湿度传感器的湿敏特性及呼吸特性进行测试分析。采用自组装方法制备氧化锌修饰氧化石墨烯薄膜湿度传感器,采用电子扫描电镜对其形貌进行表征,基于555多谐振荡器和STM32单片机构筑了一种柔性薄膜型呼吸检测装置,并对其性能进行了测试。实验结果表明,该呼吸检测装置具有高灵敏度及优良的响应与恢复特性,并且经蓝牙同手机通信可实时显示呼吸频率,展示了较好的呼吸检测效果。 相似文献
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采用非醇盐溶胶-凝胶工艺在Al2O3基片上旋转涂敷制得掺Sb的SnO2薄膜。再经直流溅射制得掺Pt的Sb:SnO2薄膜,探讨了不同Pt添加量对气敏性能的影响。结果表明,对Pt的溅射时间为90s时,元件对50ppm浓度乙醇气体的灵敏度高达43。经选择性研究表明,该元件有较好的选择性和优异的酒敏特性。 相似文献
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柔性透明导电ZnO基薄膜的制备及其发展前景 总被引:1,自引:0,他引:1
随着电子器件向小型化和轻便化方向发展,柔性衬底的透明导电薄膜将成为硬质衬底透明导电薄膜的更新换代产品,柔性透明导电薄膜ZnO具有优异的光电性能且资源丰富、成本低、对环境无污染,成为当前的研究热点.总结了近年来对柔性衬底材料处理的方法,分析了柔性透明导电薄膜的研究历史和现状.综述了柔性透明导电ZnO膜的主要制备技术及其优缺点,阐述了当前该领域的最新研究成果及应用,并讨论了工业应用对柔性透明导电膜的性能要求及其未来发展趋势. 相似文献
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综述目前SnO2纳米微粒的常用制备方法,简要分析了各类制备方法的基本原理及特点.在归纳、总结和比较的基础上,指出了制备SnO2纳米微粒有发展潜力和应用前景的方法,并对制备SnO2纳米微粒的发展前景作了简要的介绍. 相似文献
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Fluidized chemical vapor deposition (FCVD) technology was developed for coating SnO2 thin film on ultrafine Al2O3 particles.Transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) analyses demonstrated that SnO2 films with different structures were deposited through controlling the coating temperature, reactant concentration, etc.. Nanocrystalline SnO2 film was formed at 572.15K by gas phase reaction of SnCl4 and H2O.Electron probe microanalyser (EPMA) and energy dispersive spectrometer (EDS) analyses indicated that the distribution of nanocrystalline SnO2 over inner and outer part of the Al2O3 agglomerates was homogeneous. 相似文献
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Hua Bin Shi Liyi 《上海大学学报(英文版)》1999,(1)
1 Introduction Tindioxidefilmshavebeenwidelyusedasconductiveelectrodes,transparentcoatings,andheterojunctionsolarcells.SnO2filmswithdifferentstructurescanbeconstructedbychemicalvapordepositiononsubstratesofdifferenttemperatures.AboafandMarcotte[1]pr… 相似文献
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马勇 《重庆大学学报(英文版)》2003,2(1)
1. Introduction SnO2 is an n-type semiconductor with rutile crystal structure and with a wide band gap of about 3.6 eV. SnO2 has a wide range of applications as photo-detectors, heat mirrors, transparent electrodes for solar cells, conductive filler, thick resistors, catalysts and gas sensors. One of the most important applications of SnO2 lies in gas sensors [1]. SnO2 gas sensors have been attracting much attention [2-5] because of their many advantages over current technologies for detect… 相似文献
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Xiao-lin Zong Chun-sheng Wu Xiao-ling Wu Yun-feng Lu Ping Wang 《Journal of Zhejiang University. Science. B》2009,10(11):860-866
Titanium dioxide (TiO_2) thin film was deposited on the surface of the light addressable potentiometric sensor (LAPS) to modify the sensor surface for the non-labeled detection of DNA molecules. To evaluate the effect of ultraviolet (UV) treatment on the silanization level of TiO_2 thin film by 3-aminopropyltrietboxysilane (APTS), fluorescein isothiocyanate (FITC) was used to label the amine group on the end of APTS immobilized onto the TiO_2 thin film. We found that, with UV irradiation, the silani-zation level of the irradiated area of the TiO_2 film was improved compared with the non-irradiated area under well-controlled conditions. This result indicates that TiO_2 can act as a coating material on the biosensor surface to improve the effect and effi-ciency of the covalent immobilization of biomolecules on the sensor surface. The artificially synthesized probe DNA molecules were covalently linked onto the surface of TiO_2 film. The hybridization of probe DNA and target DNA was monitored by the recording of Ⅰ-Ⅴ curves that shift along the voltage axis during the process of reaction. A significant LAPS signal can be detected at 10 μmol/L of target DNA sample. 相似文献
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介绍了玻璃光波导的结构、工作原理、制作方法及其在检测挥发性有机气体中的应用,即过氧聚钨酸薄膜/钾离子交换玻璃光波导气体传感元件的研制过程.结果表明,所研制的传感元件能检测的甲苯蒸汽的体积比为5×10-5,体积比在5×10-5~1×10-2范围内有良好的线性关系(R=0.9940),该传感元件具有可逆性好、容易制备、操作方便、成本低廉等特点. 相似文献
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Hua Bin Shi Liyi 《上海大学学报(英文版)》1999,(2)
NomenclatureCAOconcentrationofsourcevapor,mol/m3DA(A=FCW,NCW,FCW)dimensionlessratesoffilmcoating,nucleationcoatingandtotalco... 相似文献
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A theoretical treatment of simulating the morphology and content of SnO2 film coated on ultrafine Al2O3 particles in fluidized bed by chemical vapor deposition (CVD) was developed. The present model accounted for chemical reaction, coagulation, film coating, nucleation coating and gas entrainment of the coating process, which made it possible to predict the quality and quantity of the film coated. By means of Tenanor's method, the model was calculated numerically. Part of the numerical results were compared with the experimental data. 相似文献